ATLANTIS is a cutting-edge, high-performance In-Line Scanning Acoustic Tomography (SAT) C-SAM inspection system, designed to deliver exceptional speed and flexibility in high-volume production environments. It is optimized for a wide range of wafer-level products, including HBM, TSV, bonded wafers, stacked wafers, MEMS, chip-on-wafer, leadframe strips, power modules, and multi-layer ceramic chips, enabling fully automated inspection processes.
Utilizing ultra-high-resolution C-SAM technology with micron-level sensitivity, ATLANTIS excels at detecting hidden defects—such as voids, delamination, and cracks—within wafer samples quickly and accurately. Its advanced dual-transducer setup, synchronized with a multi-axis linear motor-based scan stage, leverages a spiral scan pattern to achieve inspection speeds up to four times faster, enabling 100% inline detection of fine defects.
Key Features and Advantages:
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Fully Automated Inline C-SAM Inspection: Supports 200mm to 300mm wafers, suitable for FOUB, FOSB carriers, and SMIF pods.
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Advanced Signal Processing: Equipped with 300MHz and 1GHz producers, pulse generators, receivers, and digital analyzers, ensuring precise defect detection.
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Flexible Scan Modes: Offers XY and R-Y selectable scan modes, providing highly efficient spiral (RY) and line (XY) scans, along with site review and calibration support.
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Pre-Scan Functionality: Auto height adjustment before scanning for precise and reliable inspection.
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Dual and Triple Transducer Support: Options to mount twin (2x) or triple (3x) transducers on a single stage, enabling a 2-3x boost in productivity.
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Centering and Alignment: Uses advanced software algorithms and linear motor-driven centering modules to automatically align wafer centers to micron-level precision.
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Non-Contact Scanning: The waterfall transducer design provides a non-contact scan, reducing the risk of contamination or false bonding indications.
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Enhanced Airflow for Efficient Cooling: Equipped with air knives mounted on the scan stage and instrument I/O ports to ensure smooth airflow and system cooling.
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High-Performance Wafer Chuck: Capable of handling wafers with up to 5mm of warpage, ensuring stable inspection even for deformed wafers.
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Waterfall Transducer Water Guard System: Minimizes splashback and contamination risk by using a water guard to control water flow during scanning.
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TR Calibration Jig Block: Regular calibration ensures consistent and reliable results across inspections.
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AI-Driven Image Enhancement: Integrated deep learning technology automatically improves image quality, reduces noise, and enhances analysis accuracy, resulting in clearer, more precise inspection outputs.
ATLANTIS combines advanced hardware with AI-driven software to provide a complete, efficient, and automated inline inspection solution, essential for next-generation semiconductor manufacturing processes. Its unparalleled speed, precision, and flexibility make it an indispensable tool for high-volume production lines requiring fast, reliable defect detection and quality control.
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We’re Here to Help
We warmly welcome any inquiries regarding product specifications or pricing.
With English-speaking staff on our team, we’re well-prepared to assist you efficiently and clearly.
Please don’t hesitate to contact me directly — I will personally respond to your email.
You can reach me at: hy.kang@kovistek.com
