The ELLIS Series is a high-precision spectroscopic ellipsometer designed to non-destructively determine film thickness, optical constants (refractive index n, extinction coefficient k), and other physical properties such as surface roughness, composition, and uniformity. It achieves this by analyzing the change in polarization of light reflected from the sample surface. With superior angular resolution, broad wavelength range, and powerful software automation, ELLIS delivers precise, repeatable measurements for both research and industrial process control.
Key Features
- Film Thickness Measurement: Ultra-thin films, native oxides, roughness layers, and multilayer stacks
- Optical Constants: Simultaneous n and k determination
- Material Characterization: Composition, concentration, microstructure, and uniformity
- Thickness Range: From 3–5 Å to several tens of microns (up to 50 μm depending on configuration)
- Thickness Precision: <1 Å or 0.1%
- Layer Capability: Up to 12-layer stack modeling
- High-resolution Goniometer:
- Manual (5° step)
- Automatic (0.001° resolution)
- Beam Spot Size: Standard 1–5 mm; optional focused beam mode
- Wide Spectral Range: From DUV to NIR (190–1700 nm)
- User-Friendly Software: Intuitive Windows GUI, recipe-based setup, real-time data visualization, automatic calibration, unlimited measurement points, and SPC integration
🛠️ Specification Table
| Category | Specification |
|---|---|
| Detector Types | CCD, CMOS Array, InGaAs |
| Wavelength Range | 190–1100 nm (DUV-Vis), 370–1100 nm (Vis), 370–1700 nm (Vis-NIR), 190–1700 nm (Full D-V-N) |
| Spectral Resolution | 0.01–3 nm |
| Wavelength Points | User-defined (limited only by resolution) |
| Data Acquisition Time | 100 ms – 10 s (user adjustable) |
| Incidence Angle Range | 20°–90° |
| Incidence Angle Control | Manual: 5° step / Auto: 0.001° resolution |
| Polarization Optics | Rotating polarizer, analyzer, and/or compensator combinations |
| Beam Spot Size | 1–5 mm (standard), focusable (optional) |
| Light Source | D2 + TH, Xe, TH lamps |
| Lamp Lifetime | TH: 10,000 hrs / D2+TH or Xe: 4,000 hrs |
| Thickness Accuracy | Better than 0.25% |
| Refractive Index Accuracy | Better than 0.0001 |
| Z-stage | Customizable upon request |
| Motorized Stage | R-T or XY type |
| Stage Positioning Accuracy | ≤±1.5 μm or 10 μm |
| Wafer Chuck | Custom-designed |
| Frame & Isolation | Available in benchtop or automated configurations |
🧪 Application Fields
- Semiconductor Process Films: PR, PI, SiO₂, Oxide, Nitride, CMP, SOC, PBO
- Dielectrics and Optical Materials
- Display Technologies: OLED, LCD, Glass, ITO, TCO layers
- Optical Coatings: Hard coatings, anti-reflective layers, parylene, medical devices
- 📩 Contact Us
For product inquiries or pricing details, feel free to reach out. We have fluent English-speaking staff ready to assist. Please contact me directly at hy.kang@kovistek.com — I will be happy to support you.
