The FILCON Series represents a family of high-performance Spectroscopic Reflectometers designed for rapid, non-destructive measurement of optical thin film properties — including thickness, refractive index, and absorption coefficient — across a wide range of transparent films from a few nanometers to several microns.
Built for precision and versatility, these systems support both R&D environments and high-volume production lines, with solutions tailored to substrate size, film type, and automation needs.
Key Features & Capabilities
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Film Thickness Range: 5 nm to 10 mm
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Beam Spot Size: 10 µm to 5 mm
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Measurement Speed: 0.5–1 sec per point
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Incident Light Source Options: Tungsten-Halogen (TH), Deuterium (D2), Xenon, or hybrid combinations
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Layer Analysis: Simultaneous measurement of up to 5 layers
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Angle of Incidence: Normal incidence reflectometry (transmission/reflection intensity-based)
📏 Measurement Parameters
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Thin Film Thickness
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Reflectance Spectrum
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Absorption Coefficient
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Refractive Index (n)
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Multi-layer optical stack analysis
⚙️ Automation & Integration Options
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Fully Automated Systems up to 12” wafer capability
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EFEM-compatible, Full Fab Automation support
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Optional Auto-Focus (AF) Laser Sensors
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Vision-based PRS Pattern Recognition for advanced targeting
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Customizable R-Theta, XY, or XYZ motorized stages
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2D/3D Mapping, unlimited site measurement points
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Real-time Live Camera Targeting
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Windows-based GUI with user-friendly recipe creation
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Comprehensive SPC & Reporting Tools
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Supports SECS/GEM & GEM300
💡 Application Fields
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Semiconductor Films: PR, PI, SiO₂, SiNₓ, Oxide, CMP layers, SOC, PBO, and more
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Dielectrics & Low-k Materials
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Advanced Packaging (WLP, PLP)
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Display Panels: OLED, LCD, Glass, ITO, TCO
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Optical Coatings: Hard coating, anti-reflection layers, parylene films
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Medical Devices & Functional Coatings
📌 Product Line Overview
FILCON-30 Vision
300 mm high-speed SR system with R-T-Z stage, image auto-focus, and live camera view for precise targeting and dimension measurement.
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≤ 0.5% repeatability
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2D mapping camera with XY measurement
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Adjustable measurement speed (<0.5 sec)
FILCON-SR300R
Optimized for semiconductor WLP process control, covering 5 nm to tens of microns.
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R-T-Z motor stage
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Repeatability ≤ 0.3%
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Ideal for inline process metrology
FILCON-SR300M
Microscopic SR based on the 30Vision platform with high-resolution spot size (determined by objective lens).
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XYZ motor stage
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Image-based autofocus
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Precision mapping with repeatability ≤ 0.3%
FILCON-SRSE300
Hybrid system combining Spectroscopic Reflectometry (SR) and Spectroscopic Ellipsometry (SE) for flexible high-speed and high-accuracy measurements.
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Configurable with R-T or XY stages
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One tool, dual-mode operation
FILCON-SR300F / SR150F
Fully automated in-line SR solutions for 12″ or 8″ wafers, configurable with EFEM, Auto-Focus, Vision PRS, RFID/OCR, and 50 µm test key measurement.
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SECS/GEM, GEM300 supported
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Custom automation and I/O available
If you’re seeking a comprehensive thin-film metrology platform with world-class automation, precision, and flexibility, the FILCON Series offers a scalable solution — from benchtop research setups to fully automated fab-level integration.
📩 Contact Us
For product inquiries or pricing details, feel free to reach out. We have fluent English-speaking staff ready to assist. Please contact me directly at hy.kang@kovistek.com — I will be happy to support you.