Why Non-contact Measurement Matters
In today’s semiconductor manufacturing, non-contact resistance measurement has rapidly emerged as a key technology.
And it’s not just about accuracy.
As wafer integration and miniaturization continue to advance, surface sensitivity increases—
making traditional probe contact methods a major risk for contamination and mechanical damage,
both of which directly impact process yield.
In particular, in metal thin films and new material layers, even slight issues like micro-scratches or residual charge during measurement can cause significant yield variations.
Under these conditions, high-precision non-contact resistance measurement has become more than just an alternative —
it’s now an essential solution for process stability and material reliability.
Today, we’re excited to introduce EDDYTM-300, our latest Eddy Current-based Non-contact Sheet Resistance Measurement System,
engineered to meet the demands of next-generation semiconductor and advanced material applications.
Key Specifications at a Glance
| Category | Specification |
|---|---|
| Measurement Method | Non-contact Eddy Current |
| Target Materials | Metal thin films, ITO/TCO, graphene, CNT, thin-film electrodes |
| Sample Size | Up to 300 mm wafers and large-area panels |
| Measurement Items | Sheet resistance (Rs), resistivity, thickness |
| Sensor Configuration | Up to 4 auto-switching Eddy sensors (optimized by film thickness) |
| Automation | Recipe-based mapping / Inline handler integration |
| Repeatability | Within ±0.5% |
| Consumables | None (non-contact, non-destructive) |
Core Technology — Eddy Current Non-contact Measurement
EDDYTM-300 utilizes Lenz’s and Fleming’s laws to generate and precisely control magnetic fields,
allowing it to analyze a sample’s electrical conductivity without physical contact.
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No scratches or contamination — ever.
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No probe replacement — zero maintenance cost.
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Capable of measuring samples with rough or oxidized surfaces.
In short, it’s a non-destructive, consumable-free precision measurement system
that delivers fast and stable resistance data with a single setup.
Precision Design Highlights of EDDYTM-300
1. Multi Eddy Sensor Configuration
Up to four Eddy sensors automatically rotate depending on sample thickness and material type.
→ Ensures optimal precision for films, metal layers, and composite coatings.
2. Recipe-based Multi-point Mapping
Automated mapping measurement through programmable recipes,
→ enabling seamless data collection and analysis without manual operation.
3. Anisotropy Resistance Analysis
Analyzes directional resistance (anisotropy) based on crystal structure.
→ Ideal for defect detection and material uniformity evaluation.
4. Automatic Height Control & Laser Sensor
A high-precision laser sensor automatically calibrates sample height,
→ maintaining constant measurement distance for maximum accuracy.
5. Inline-ready Automation
Fully compatible with inline handlers,
→ supporting seamless production integration and automated process control.
Applications Across Industries
| Industry | Representative Materials / Applications |
|---|---|
| Semiconductor / Display | Wafers, OLED, LED, ITO, TCO |
| Advanced Materials Research | Graphene, CNT, silver nanowire, metal thin films |
| Energy / Photovoltaics | Solar cells, batteries, fuel cells |
| Smart & Architectural Glass | Low-E coatings, conductive films, smart glass |
| Electronic Materials / Films | Flexible circuits, anti-static films, metallized labels |
Why Choose EDDYTM-300
✅ Completely Non-contact & Non-destructive — No sample damage
✅ Zero Maintenance Cost — No probe or consumable replacement
✅ Fully Automated & Large-area Compatible — From 300 mm wafers to panels
✅ High-precision Data Output — For process optimization and material evaluation
Contact & Demo Request
EDDYTM-300 is more than a measurement instrument —
it’s a key enabler for process quality, efficiency, and reliability.
We’re Here to Help
We warmly welcome any inquiries regarding product specifications or pricing.
With English-speaking staff on our team, we’re well-prepared to assist you efficiently and clearly.
Please don’t hesitate to contact me directly — I will personally respond to your email.
You can reach me at: hy.kang@kovistek.com
