The RSQ Series is a state-of-the-art 4-point probe measurement system engineered for precise evaluation of sheet resistance (RS) and resistivity (RES) in conductive thin films. From compact research setups to fully automated in-line semiconductor fab equipment, RSQ offers scalable solutions tailored to every application.
🔍 Key Features
Proven Quality
- 1mm spacing standard 4-point probes (TC-40/150/200 series)
- High repeatability: ≤±0.5 CV% (Max 0.2%)
- Wide measurement range:
- RS: 1 mΩ/□ ~ 10 MΩ/□
- RES: 100 µΩ·cm ~ 1 MΩ·cm
- Accurate measurement of ultra-thin to thick films
Intuitive Software
- Latest Windows GUI with user-friendly ergonomics
- Recipe-based configuration for flexible setup
- Unlimited measurement point programming
- Comprehensive data reporting with SPC
- 2D/3D visual mapping of measurement data
Advanced Options
- Automated ceramic cleaning plate
- Probe alignment jigs
- CRM wafers included
- Laser height sensor (optional)
- Vacuum chuck stage (customizable)
- XY or R-θ motorized stage
- Adjustable motor stroke range
🌐 RSQ Product Lineup
RSQ-3000
- For 300mm wafers
- Semi-automated E-mapping system
- R-θ motorized stage
- ≤ 120 sec high-speed measurement (49 points)
- TCP/IP high-speed communication
- MES compatibility (optional)
RSQ-3000F
- Fully automatic in-line system
- For 300mm wafer production lines
- Vision PRS (optional)
- SECS/GEM, GEM300 protocol supported
RSQ-6000
- Specialized for 600mm PLP applications
- Y-X Gantry-type stage with optional Z-laser sensor
- Semi-automated mapping
- High-throughput TCP/IP communication
🔧 Application Areas
- Semiconductor films: Metal (Nitride, Silicide, Cu, Al), Non-metal (Si, SiGe, Ge, Epi Si)
- Process evaluation: Diffused layers, ion implantation, epitaxial layers, and bulk silicon
- Display (FPD), PLP, and other metallic thin films
✨ Highlighted Capabilities
- High-speed automated RS testing on 300mm wafers
- Dual-mode (normal and high-precision) 4-point probing
- Supports film thickness range from 3nm to 1,500nm
- Repeatability option: ≤ (0.2 ~ 0.7 CV%)
- Additional evaluations: Resistivity, Conductivity (P/N-type), Film Lifetime, TCR
- Edge exclusion: 1.5 ~ 3 mm (optional)
- Supports CSV, TXT export formats for SPC
- Seamless integration into MES environments
We’re Here to Help
We warmly welcome any inquiries regarding product specifications or pricing.
With English-speaking staff on our team, we’re well-prepared to assist you efficiently and clearly.
Please don’t hesitate to contact me directly — I will personally respond to your email.
You can reach me at: hy.kang@kovistek.com
