In the semiconductor and thin-film industries, the importance of sheet resistance (Rs) measurement has rapidly increased.
Accurate evaluation of a material’s electrical conductivity is essential to ensure stable process quality and yield performance.
While non-contact (eddy current or optical) measurement systems have gained attention for their speed and non-destructive nature,
the contact-type (4 Point Probe) method remains the reference standard in precise electrical characterization.
Why Contact-Type Measurement Still Matters
The reason is simple — a 4 Point Probe system injects current and measures voltage directly on the sample surface,
accurately reflecting the material’s real electrical properties.
This makes it the most reliable method for high-precision and high-consistency data acquisition,
especially in R&D laboratories and production calibration lines.
As sheet resistance becomes more critical in process control,
the contact-type 4 Point Probe remains the industry standard for its unrivaled accuracy and repeatability.
Below is our recommended high-precision contact-type sheet resistance solution,
the KOVIS RSQ Series.
KOVIS RSQ Series – High-Precision Contact-Type Sheet Resistance & Resistivity Measurement System
The KOVIS RSQ Series automatically creates mapping recipes for measurement points,
enabling fully automated sheet resistance (Rs) and resistivity testing with superior precision.
Among the series, the RSQ-3000 model adopts a verified 4 Point Probe (4PP) configuration,
allowing users to directly evaluate the electrical characteristics of thin films
and perform comprehensive process control with ease.
Metrology Features & Advantages
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Automatic Mapping 4PP RS Measurement – up to 12” wafer
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Measurement Range: 1 mΩ/□ ~ 10 MΩ/□
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Film Thickness Range: 3 nm ~ 1,500 nm
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Measurement Speed: 120 sec (49 points / 300 mm wafer, laser off)
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Repeatability: ≤ 0.2 CV% (@1σ, 10 times)
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Internal Resistance Accuracy: ± 0.1% (1 Ω ~ 1 MΩ)
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Edge Exclusion: ≤ 1 mm (Micro) / ≤ 3 mm (Macro)
Probing & Stage System
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High-precision 4 Point Probe (Micro / Macro selectable)
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Micro 4PP: 600 µm / 1,050 µm / 2,000 µm tip width
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Macro 4PP: Jandel 3 mm tip width
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Ryo-θ Stage for accurate resistivity testing
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Optical Laser Height Control for stable surface contact
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Thickness / Edge / Temperature Correction for resistivity accuracy
User-Friendly Operation
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Windows-based GUI for intuitive operation and easy data management
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Flexible Multi-point Mapping Recipe Creation
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SPC Report Output: CSV, TXT file formats
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Real-time 2D / 3D Graphic Display for data visualization
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MES, TCP/IP Communication (SEC/GEM, GEM300 optional)
Application Areas
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Semiconductor Films: Silicon, Polysilicon, Metal Thin Films (Nitride, Silicide, Al, Cu, etc.)
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Non-metal Films: Implanted Si, SiGe, Ge, Epi Si, Transparent Films
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Process Evaluation: Diffusion, Ion Implantation, Epitaxial, FPD, PLP, and more
Why Choose the RSQ-3000?
Accuracy, Stability, and Automation — The Three Pillars of Reliable Sheet Resistance Measurement.
From R&D environments to full-scale production lines,
the KOVIS RSQ Series redefines the standard for high-precision sheet resistance (Rs) testing.
Engineered for consistency and simplicity, it provides the ultimate 4 Point Probe solution
for advanced semiconductor and thin-film applications.
Contact & Demo Request
RSQ-3000 is more than a measurement instrument —
it’s a key enabler for process quality, efficiency, and reliability.
We’re Here to Help
We warmly welcome any inquiries regarding product specifications or pricing.
With English-speaking staff on our team, we’re well-prepared to assist you efficiently and clearly.
Please don’t hesitate to contact me directly — I will personally respond to your email.
You can reach me at: hy.kang@kovistek.com