thin film characterization system

Sheet Resistance Meter – 4 Point Probe (Contact-Type Sheet Resistance / Thin Film Measurement System)

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In the semiconductor and thin-film industries, the importance of sheet resistance (Rs) measurement has rapidly increased.Accurate evaluation of a material’s electrical conductivity is essential to ensure stable process quality and yield performance. While non-contact (eddy current or optical) measurement systems have gained attention for their speed and non-destructive nature,the contact-type (4 Point Probe) method remains … Read more

Non-contact Sheet Resistance Measurement System (EDDYTM-300)

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Why Non-contact Measurement Matters In today’s semiconductor manufacturing, non-contact resistance measurement has rapidly emerged as a key technology.And it’s not just about accuracy. As wafer integration and miniaturization continue to advance, surface sensitivity increases—making traditional probe contact methods a major risk for contamination and mechanical damage,both of which directly impact process yield. In particular, in … Read more